Semiconductor Ware Category
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SEMICONDUCTOR GRADE FUSED QUARTZ

Fused quartz, with its combination of high purity and mechanical stability at high temperatures, is the ideal material used in the processing of silicon wafers. Technical Glass Products uses only the highest grade raw materials, offering contaminant levels less than 25 ppm. Quartz tubing is available in a number of sizes up to 400 mm, with excellent diameter and wall-thickness tolerances. We offer a full range of fabricated semiconductor ware, along with design assistance from our technical staff. At right is a list of some of the items we manufacture:

  • Plasma Chambers
  • Tanks
  • Lattice Trays
  • Epitaxial Systems
  • Hanger Supports
  • Pedestals
  • Removable Baffles
  • Diffusion Tubes
  • White Elephants
  • End Cap
  • Diffusion Boats
  • Sensor Sheaths
  • Bell Jars
  • Pull Rods
  • Storage Tubes
  • Boat Holders
  • Boat Holder Inserts
  • Thermocouple Sleeves
  • Paddle Systems
  • Sleds
  • Wheeled Carriers

 

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